https://www.cljzmet.com/titanium/rotary-target.html https://www.cljzmet.com/uploads/42228/small/rotary-target8593c.jpg Rotary Sputtering Target Rotary Target Technical Specification – Semiconductor Grade‌ Material & Purity‌ Base Materials‌: Cu, Ta, Co, Ru, W, TiN, TaN (5N–6N purity: 99.999%–99.9999%) Impurity Limits‌: Oxygen: 30 MPa at 25°C; stable under thermal cycling (–40°C to 300°C) Surface Finish‌: Ra ≤ 0.2 μm; no microcracks, inclusions, or porosity (verified by SEM/EDS) https://www.cljzmet.com/uploads/42228/video/202603241700514cfc5.mp4 2026-03-24T17:31:41+08:00 yes no