Chromium Sputtering Target

Chromium Sputtering Target

Chromium (Cr) is a metallic element with high hardness, high melting point and oxidation resistance, and the production of chromium targets is a precise and complex process. Chrome target shape: customized plane target shape Chromium target purity: 2N5, 3N, 3N5 Chrome target size: according to drawings or other customized
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Description

Chromium Sputtering Target is purchased when the coating recipe deliberately needs chromium as a metal source, not merely another round target for a PVD cathode. Some programs deposit metallic chromium as a visible finish, an adhesion layer, or a transition layer under a harder coating. Others use the same metallic source in nitrogen or oxygen to form chromium nitride or chromium oxide films. Those three operating states ask different questions at the buying stage because the target face, chamber gas, power history, and conditioning routine can move the process toward a metallic, poisoned, or partially reacted surface.

For chromium, the first buyer decision is therefore process state control. Geometry and backing still matter, but they come after the coating team has said whether the target will run mainly metallic, in a nitride window, in an oxide window, or through planned mode changes. A stable purchase package names the chromium material basis, the surface condition, the cathode interface, and the evidence needed at receipt. It does not pretend that a material certificate can approve film hardness, color, stress, or stoichiometry. Those results belong to the qualified sputtering process.

Machined chromium sputtering target face for installation in a PVD cathode
The chromium face, rear interface, and edge profile form one cathode-specific component.

Start With the Chromium Surface State

A metallic chromium process normally asks for a clean metal surface that conditions predictably and returns to the same voltage and rate behavior after pauses. A chromium nitride process adds nitrogen and usually works with a different balance of gas flow, target-surface reaction, arc tendency, and film stress. A chromium oxide process adds oxygen, which can create a more insulating surface state and a more sensitive conditioning path. Buying the same target shape for all three routes without naming the route hides the real risk.

The enquiry should describe the intended operating state in practical terms: metallic chromium, reactive nitride, reactive oxide, or development across more than one state. That description helps decide which records are useful. Chemistry and target dimensions support source control. Face preparation and edge condition support stable introduction to the cathode. Chamber conditioning, gas sequence, and process limits remain with the coating owner. Keeping those boundaries clear prevents raw-target paperwork from being treated as film approval.

Chromium routeMain buying questionRecord that helps
Metallic chromiumWill the target reproduce the accepted metal-source input?Lot chemistry, finished drawing, face condition
Chromium nitrideCan the target be introduced without changing the qualified reactive window?Same target records plus stored conditioning history
Chromium oxideAre surface preparation and process startup controlled enough for oxygen operation?Face release, edge review, chamber recipe records
Mode developmentHow will one target be tracked through state changes?Serial identity, run sequence, before-and-after face images

Decide What the Chromium Layer Is Doing

A chromium adhesion layer under another metal does not create the same impurity priorities as an exposed decorative metal layer. A hard chromium nitride coating does not create the same review as an optical chromium oxide layer. The material choice should be connected to the layer's function: adhesion, color, electrical contribution, wear surface, optical behavior, or transition between other films. That is the logic that tells the buyer which analytical details deserve attention.

Use a named chromium basis and list only the controlled elements that matter to the accepted program. A broad phrase such as high purity can be useful shorthand inside a qualified plant, but it is weak as purchase language unless the reported impurities and calculation basis are known. When the coating stack is still comparing chromium with another refractory source, review a Molybdenum Sputtering Target as a different film element rather than as a substitute target body. If chromium is fixed and the open question is analytical depth, the purity-focused target overview is the more relevant comparison.

Make the Cathode Interface Serve the Process State

Chromium target drawings should show the features that keep the qualified process from being disturbed: outside diameter or outline, active face, rear seating surface, holes, grooves, clamping lands, chamfers, and any keep-out area. For reactive work, edge chips, loose particles, or unexpected contact marks can become part of a startup investigation, so the drawing should distinguish working face, rear contact, and handling zones. A simple front diameter is not enough when the target has to enter a known cathode without changing conditioning behavior.

Backed and monolithic constructions should be chosen from the installed hardware. A bonded assembly adds a backing material, a joint, and a thermal path; a direct-clamped target keeps the supply boundary closer to the chromium body. If both could fit, they should be compared as different configurations, not as equal price lines. The accepted configuration should remain tied to the chromium route because the same mechanical change can affect metallic and reactive processes differently.

Generic high purity target form used only to compare cathode construction
This catalog target is a construction reference only; the local library has no second verified chromium image, so it is not evidence of chromium chemistry.

Keep Trial Evidence Paired: Target State and Chamber State

Reactive chromium problems are easy to misdiagnose when records are separated. If arcing, rate drift, color shift, or particle increase appears, keep target serial, lot, face images, erosion position, and edge condition together with gas flow, pressure, power, conditioning time, shield condition, substrate map, and cleaning history. The useful question is not whether the target or process is guilty. The useful question is which controlled input changed before the observation.

For repeat orders, freeze the accepted drawing revision, material basis, face preparation, backing arrangement, and any approved deviations. For development orders, state that the target is being used to explore metallic, nitride, or oxide conditions and define how the trial will be logged. That distinction avoids overloading the first target with repeat-production expectations before the coating team has selected a stable operating window.

Event during useTarget evidence to retainProcess evidence to retain
Startup arcingFace image, edge image, serial, recent handlingGas sequence, pressure, ramp profile, chamber condition
Film color or phase shiftLot identity and erosion positionNitrogen or oxygen flow, substrate history, test method
Particle excursionSurface marks, package condition, mounting contactShield state, cleaning interval, substrate map
Installation mismatchFinished dimensions and rear featuresCathode reference and hardware measurement

Chromium Target Questions From Coating Teams

Is the same chromium target used for metal, nitride, and oxide films?

The source may be metallic chromium in all three cases, but nitrogen or oxygen changes the operating state of the target face. Treat each reactive route as its own process condition, even when the installed target geometry is unchanged.

What should be stated before asking for purity data?

State the chromium layer function and the process route. An adhesion layer, a metallic finish, a nitride coating, and an oxide film may need different impurity review, so the analysis list should follow the actual film risk.

Does a chromium target certificate prove chromium nitride film quality?

No. The certificate controls the metallic source. Nitride phase, stress, hardness, adhesion, and rate depend on the chamber recipe, conditioning sequence, substrate, and test method.

When does target construction become a process-change issue?

A change from monolithic to backed construction, a different rear contact, a new face preparation, or altered edge treatment can change installation and conditioning. The coating owner should decide whether that requires a trial.

Can a used chromium target define the next order?

It can show mounting style and wear pattern, but the eroded face cannot recover the original contour. Use the released drawing or an unworn reference for starting geometry.

Define the Purchase Around the State to Be Controlled

A useful request names Chromium Sputtering Target, the chromium material basis, intended operating route, finished drawing, construction type, quantity, face preparation, rear interface, and required records. Add bond review, marking location, protected surfaces, and package support only where they affect installation or traceability. The most important line is the one that tells the technical reviewer whether the target will run as metallic chromium, reactive nitride, reactive oxide, or a controlled development article.

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